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July 2010

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Subject:
From:
"Richard D. Krug" <[log in to unmask]>
Reply To:
TechNet E-Mail Forum <[log in to unmask]>, Richard D. Krug
Date:
Fri, 30 Jul 2010 11:53:55 -0400
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Years ago I was doing plasma deposition of a variety of hydrocarbons.  I cleaned with argon plasma, then wiped out chamber to remove bulk deposits, then cleaned with oxygen plasma.  It was a lab environment.  Each of the cleaning cycles was about an hour.  

Dick Krug, CSMTPE
SMT Process Engineer
Sparton Corporation
30167 Power Line Road
Brooksville, FL  34602-8299
p (352) 540-4012  (Internal Ext. 2012)
[log in to unmask]

-----Original Message-----
From: TechNet [mailto:[log in to unmask]] On Behalf Of Douglas Pauls
Sent: Friday, July 30, 2010 9:01 AM
To: [log in to unmask]
Subject: [TN] Plasma Chamber Maintenance

Good morning all,

On a topic other than rhubarb, raiding my cubicle for prizes, and selling 
off my children, I have an actual technical question.

We have started to use plasma chambers as a preparation for conformal 
coating and are having some excellent results.  One of our IEs, with a 
background in the semiconductor industry, had indicated that the chambers 
can be items that are hard to maintain or high in maintenance costs.

So, for you plasma chamber users out there, what have your experiences 
been with plasma chamber maintenance?

Doug Pauls

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