Thank you Steve.
Does your silicone rule refer to cured or uncured silicone or both? And
when you talk about "high energy", what wattage level are we talking
about? How long an oxygen cycle do you recommend for burn off.
I will have to play a little with hydrogen.
Not sure if I know what you mean by arc plasma. In in-line ones that I
have seen are largely made for things like bare boards, and not
assemblies.
Doug Pauls
Steven Creswick <[log in to unmask]>
Sent by: TechNet <[log in to unmask]>
07/30/2010 09:22 AM
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Re: [TN] Plasma Chamber Maintenance
Doug,
One of our rules was - thou shalt not put silicones in the chamber!
Other than that, periodically we would use a really fine scotchbrite and
clean room vac to physically clean the interior of the chamber.
Then, as Joyce indicates, a nice high energy oxygen plasma to ash off any
remaining organics and argon to knock off a few more offensive molecules.
From a wire bonding point of view, I have found argon with 4% hydrogen to
provide a slight edge on cleaning over straight argon. Not sure if that
would apply to CC adhesion of not.
Have you tried the arc plasma cleaners/surface activators. Can be made
into
an in-line process much easier than the batch type plasmas.
Steve Creswick
http://www.linkedin.com/in/stevencreswick
-----Original Message-----
From: TechNet [mailto:[log in to unmask]] On Behalf Of Douglas Pauls
Sent: Friday, July 30, 2010 9:01 AM
To: [log in to unmask]
Subject: [TN] Plasma Chamber Maintenance
Good morning all,
On a topic other than rhubarb, raiding my cubicle for prizes, and selling
off my children, I have an actual technical question.
We have started to use plasma chambers as a preparation for conformal
coating and are having some excellent results. One of our IEs, with a
background in the semiconductor industry, had indicated that the chambers
can be items that are hard to maintain or high in maintenance costs.
So, for you plasma chamber users out there, what have your experiences
been with plasma chamber maintenance?
Doug Pauls
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