Wayne,
Thanks for the info. I would not have guessed that!
Probably gives off some even nastier gases!!!
Steve
-----Original Message-----
From: TechNet [mailto:[log in to unmask]] On Behalf Of Thayer, Wayne
Sent: Thursday, June 18, 2009 8:20 AM
To: [log in to unmask]
Subject: Re: [TN] laser decap machine
Nitric eats GaAs. Surprised me too, but I'm not a chemist either.
Wayne Thayer
-----Original Message-----
From: TechNet [mailto:[log in to unmask]] On Behalf Of Steven Creswick
Sent: Thursday, June 18, 2009 6:55 AM
To: [log in to unmask]
Subject: Re: [TN] laser decap machine
Inge,
Virtually all of my GaAs experience had airbridges, so they were all
hermetic packages.
The fuming nitric should go after the organics only, so it shouldn't affect
the GaAs, should it?
Maybe the chemists amongst us could say for sure.
Steve
-----Original Message-----
From: Hernefjord Ingemar [mailto:[log in to unmask]]
Sent: Thursday, June 18, 2009 6:23 AM
To: TechNet E-Mail Forum; Steven Creswick
Subject: RE: [TN] laser decap machine
Depending on what you want to see, don't forget how good today's finefocus
etc are. Can see even migration dendrites on a chip. Well, you need a lot of
manipulation and experience.
Fuming acids...have you done many back-etchings? Did it work for GaAs ?
Inge
-----Original Message-----
From: TechNet [mailto:[log in to unmask]] On Behalf Of Steven Creswick
Sent: torsdag 18 juni 2009 11:42
To: [log in to unmask]
Subject: Re: [TN] laser decap machine
Ingemar - Joyce,
My limited experience with the eximer for ablation was that even though the
laser removed the organics, I still [understandably] had to deal with the
inorganics left behind - such as silica with a PEMs device.
Whether I blew it off, or washed/rinsed it off, it broke up a potentially
nice process a great deal. This was back in the olden days. To some
extent, each pulse would dislodge some of the filler ... but not enough.
Possibly provisions have been made for this by now.
Still, it is better than smelly-messy Decap, or the hazards of fuming
nitric...
Steve
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