Depending on what you want to see, don't forget how good today's finefocus etc are. Can see even migration dendrites on a chip. Well, you need a lot of manipulation and experience.

Fuming acids...have you done many back-etchings? Did it work for GaAs ?

Inge 

-----Original Message-----
From: TechNet [mailto:[log in to unmask]] On Behalf Of Steven Creswick
Sent: torsdag 18 juni 2009 11:42
To: [log in to unmask]
Subject: Re: [TN] laser decap machine

Ingemar - Joyce,

My limited experience with the eximer for ablation was that even though the laser removed the organics, I still [understandably] had to deal with the inorganics left behind - such as silica with a PEMs device.  

Whether I blew it off, or washed/rinsed it off, it broke up a potentially nice process a great deal.  This was back in the olden days.  To some extent, each pulse would dislodge some of the filler ... but not enough.
Possibly provisions have been made for this by now.


Still, it is better than smelly-messy Decap, or the hazards of fuming nitric...

Steve

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