Hi Inge!

I have done thick film gold etching--the results are easy and very
pretty.  Spin on positive photo-resist.  Very good results with co-fired
gold on LTCC because shrinkage minimizes voids.  DuPont had or has a few
decent products for this:  Fodel, 5771, and the cofired LTCC stuff. 
Etchant is potassium iodide.  Turns everything yellow--almost as bad as
FeCl.  We were able to achieve 1mil lines with 1.5 mil space, but was a
real pain since AOI can't inspect that level of detail very well and
standard photoplots are at the limits of their resolution.

Wayne

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Hi, anyone happen to have this report?

THIN PRINT ETCHABLE GOLD-AN ALTERNATIVE TO THICK AND THIN FILM
HSU, K.F.
08 Oct 1986
ADVANCED MICRODEVICES 


Inge

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