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October 2004

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From:
Mike Fenner <[log in to unmask]>
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Date:
Wed, 20 Oct 2004 16:33:18 +0100
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I always understood nothing there, the colours produced from interference
effects from surface, similar mechanism to rainbows you see on oily puddles
(but no oil) 

Regards 

Mike Fenner 
Indium Corporation 

-----
SMART European Conference UK, 16-18 November 2004
www.smartgroup.org/con2004/conference2004.pdf




-----Original Message-----
From: TechNet [mailto:[log in to unmask]] On Behalf Of Ingemar Hernefjord
(KC/EMW)
Sent: Wednesday, October 20, 2004 3:57 PM
To: [log in to unmask]
Subject: [TN] Argon plasma cleaning


Great silence at TN, or my box may miss the postings..anyway...here I have a
topic about plasma cleaning. The aluminium trays, on which we place the
ceramic substrates and other stuff for cleaning, they sometimes get
discolored spots, blue, violet, brown, black. Most of these patterns occur
along the edges. In light microscope you can see that parts of the aluminium
is etched. The trays lay on a perforated stainless steel shelf that can be
pushed in/out. There are numbers of such shelves in the chamber. As the
homogenous stainless steel door is closed during operation, I can't see how
the plasma works. I suspect that there are 'corona' lines, that bombard in
concentrated areas and digs out the aluminium slowly atom by atom.

Q1: anyone who recognizes this?
Q2: what material is best as trays?
Q3: does the aluminium redeposit on the boards for cleaning? (don't think so
myself)
Q4: what's best 'furniture' in the plasma chamber for spreading the argon
ions best way?

Ingemar Hernefjord
Ericsson Microwave Systems

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