The measured charge is from various pieces of equipment present in the
exposure room .We got the highest values from the basket where pilled out
mylar sheets are stored before disposal.
Static charge is atracticing dust and small particles.If such particle is
sitting on photoresist before or during exposure on area, that should get
light, this will lead to lack of polimerisation.
We are intending to put a few "ionizers" , this equipment is not so cheap,
so I based on survey results I have to decide which equipment should be
treated . For example, I do not innetnd to work on the mylar basket, because
it was already removed after exposure, so I should no care about
electrostatic charge ( I least this is what I thing)
More remaraks will be appreciated.
Edward
Edward Szpruch
Eltek Ltd
P.O.Box 159 ; 49101 Petah Tikva Israel
Tel ++972 3 9395050 , Fax ++972 3 9309581
e-mail [log in to unmask]
> -----Original Message-----
> From: Karen Walters [SMTP:[log in to unmask]]
> Sent: Wed August 18 2004 21:35
> To: [log in to unmask]
> Subject: Re: [TN] Advice on values of electrostatic charge
>
> Do you have ionizers on the equipment????
>
>
> (Embedded image moved to file: pic29358.pcx)
>
>
>
> "Dehoyos, Ramon"
> <ramon.dehoyos@NG To: [log in to unmask]
> C.COM> cc:
> Sent by: TechNet Subject: Re: [TN] Advice
> on values of electrostatic charge
> <[log in to unmask]>
>
>
> 08/18/2004 10:13
> AM
> Please respond to
> TechNet E-Mail
> Forum; Please
> respond to
> "Dehoyos, Ramon"
>
>
>
>
>
>
> Hi Edward:
> If it is from electronic equipment, it may not be
> ESD but an AC or DC potential. That equipment ground may be floating and
> if
> operators are grounded may be subjected to a shock from that potential.
> In general anything that generates above 0.200 KV ESD
> should be removed or if it can not be removed should be kept at least 6
> inches away from product. Move product in shielded totes or bags,
> operators
> should be grounded while handling product.
> Regards,
> Ramon
>
>
> -----Original Message-----
> From: TechNet [mailto:[log in to unmask]]On Behalf Of Keach Sasamori
> Sent: Wednesday, August 18, 2004 9:24 AM
> To: [log in to unmask]
> Subject: [TN] Advice on values of electrostatic charge
>
>
> Posting for Edward Szpruch ([log in to unmask])
> ----------------------------------------------------------------------
>
> Hi,
> Recently we made some measurements concerning Electrostatic charge on
> different pieces of equipment in our clean room.
> I got the results from 0.05 kV/inc to 5 kV/inc , but I do not know what
> is
> considered tolerable and what should be treated asap.
> Pls advice directions
> Edward
>
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