From ESD Association:
Per ANSI/ESD S20.20 Paragraph 6.2.3.1. Protected Areas Requirement
"Ionization or other charge mitigating techniques shall be used at the
workstation to neutralize electrostatic fields on all process essential
insulators if the electrostatic field is considered a threat."

Per ANSI/ESD S20.20 Paragraph 6.2.3.2. Protected Areas Guidance
"All process essential insulators that have electrostatic fields that
exceed 2,000 volts should be kept at a minimum distance of 12 inches from
ESD sensitive items."

Gene Felder
[log in to unmask]

-----Original Message-----
From:   Edward Szpruch [SMTP:[log in to unmask]]
Sent:   Wednesday, August 18, 2004 1:24 AM
To:     [log in to unmask]
Subject:        [TN] Electrostatic charge values in clean room

Hi,
Recently we made some measurements concerning Electrostatic charge on
different pieces of equipment in our clean room.
I got the results from 0.05 kV/inc to 5 kV/inc , but I do not know what is
considered tolerable and what should be treated asap.
Pls advice directions
Edward

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