JaMi,

Thanks for the pointers. I'm learning now that there is no simple answer to
the problem, precisely as Rudy Sedlak remarked.
The shear number of variables are going to make this impossible to solve
without experimentation. I will take note of your advice, and just
experiment with different nozzle positions and angling until I'm happy with
the etch uniformity. Does a 50% overlap in the spray pattern sound rather a
lot ? The datasheet for the particular nozzles I using are shown here;
http://www.bete.com/metric/products/pages/nf.htm

It would be nice to get hold of the ICP paper Rudy Sedlak was talking about.

Adam

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