Certainly plasma does its job as it has in the PCB industry for over 20
years as a method used to etch back drilled MLB polyimide holes to be
plated. Obviously, as well, it is used in the hybrid business to clean
ceramic substrates before some metallizations and assembly.

The residue, in those and other processes, is deposited as "ash" on the
chamber walls. Strangely, some process folks don't remove it as it seems a
good process indicator not to be messed with. In any case, it "cleans" the
hell out of most stuff on this or other planets.

MoonMan

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