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December 2001

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Subject:
From:
"Creswick, Steven" <[log in to unmask]>
Reply To:
TechNet E-Mail Forum.
Date:
Tue, 18 Dec 2001 13:48:49 -0500
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I know the generic answer has already been provided, but my belief is that
mixing silicones with hybrids is definitely tabo - regardless of how well
you say you clean the chamber.

Any hybrid plasma cleaner is (should be) thoroughly wiped down with (at
least IP alcohol) on a routine basis - Subject to extent of use, this may be
weekly, or bi-weekly.

Whatever is on the chamber walls has a definite chance to get re-deposited
onto a substrate (or get sucked out the vacuum stack).  Murphey's Law would
have a more than fair share going to the part you are attempting to clean...

Steve Creswick - Gentex Corp

-----Original Message-----
From: Jana Carraway [mailto:[log in to unmask]]
Sent: Tuesday, December 18, 2001 1:23 PM
To: [log in to unmask]
Subject: Re: [TN] Cleaning after plasma


Doug,

All worse case scenarios aside, please let us know what you do to resolve
the problem(s) and how well it works.  It is actually valuable information.
Jana Carraway
Micro Systems Engineering, Inc.

-----Original Message-----
From: TechNet [mailto:[log in to unmask]]On Behalf Of
[log in to unmask]
Sent: Monday, December 17, 2001 3:29 PM
To: [log in to unmask]
Subject: Re: [TN] Cleaning after plasma


Well, now that we have firmly established that I AM a two headed monster
and should be shot whenever coming within 100 yards of the clean room.....

Yes, I would have preferred not to risk the cross-contamination issue, IF I
COULD.  That plasma cleaner was the only one large enought to handle the
assemblies in question, and I was given all of today to solve a
multimillion dollar potential problem.  So going out of house was not an
option.  We already wash with a saponifier, but that does not increase the
surface roughness of the solder mask or components.  The parameters I
selected were done so with a mild etch in mind, not the aggressive profiles
used for decap.  If you have ever been in a production crunch, you know
that you often get put in positions were you would rather not be if you had
your druthers.

Doug Pauls

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