Ted Stern is correct in what he says, that mechanical aspects play a huge
part in determining etch rates, and etch factors, but chemistry plays a big
part of it as well.

A major resource for specifics in this area is Don Ball of Atotech, in State
College PA, who has probably done more well tuned research into these
questions than anybody.  I respect Don's reseach a lot, because he has not
axe to grind, and nothing to promote, he is simply doing it for technical
service for his customers.

Good luck,

Rudy Sedlak
RD Chemical Company

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