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December 2000

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Subject:
From:
sean clinton <[log in to unmask]>
Reply To:
TechNet E-Mail Forum.
Date:
Fri, 29 Dec 2000 09:49:21 -0600
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Franklin,

Here's a list of what we look for on our Developer.

Spray nozzles:  Full deflection of all nozzles, no clogs
                        Proper oscillation of manifolds.
                        All nozzles and manifolds in-line and parallel to each other
Equipment:
                        No excess solution drag out on exit. i.e. good squeegee effect
                        same on entrance
Break Point:
                     55% -65% of process chamber length.
                     We run a solution of Potassium Carbonate, Shipley's Resolve 211 at 1.0%
+/- 0.1%
                      I also recommend a good water soluble defoamer.  Avoid the use of glycol
based defoamers.  You want to avoid the slime that typically can be seen with most defoamers.

Rinsing:
                GOOD rinsing is critical.  Preferably, you want a triple cascade counter flow
rinse.  I cannot say if you would like to use heated rinses, as I have heard conflicting views
on whether this would be a good idea.

Now with all the specs out of the way, I can say our last DOE showed us that breakpoint is the
most critical of all parameters.  You can design an experiment around trace width resolution,
but you may want to contact your dry film vendor on help with DOE parameters and running
conditions.  I hope this helps you a bit.

Oh one last thing.  We had this problem a few weeks ago with opens.  Increasing the roll
pressure on your resist laminator may help a bit in increasing conformity.

Regards,

Sean Clinton
Process Engineer
Sanmina Plant 3
Santa Clara, CA


Franklin D Asbell wrote:

> Is there anyone out there that recently designed an experiement, or
> experiments for identifying best controls for a dry film developer?
>
> Still working on lifted resist and we want to ensure optimal performance
> of all equipment...while most equipment here is pretty straightforward
> in that regard, I'm looking for the best series of data or attributes to
> evaluate at the developer, thanks...
>
> And also...hope everyone has a good new year holiday...
>
> Franklin
>
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