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March 2000

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Subject:
From:
David Whalley <[log in to unmask]>
Reply To:
TechNet E-Mail Forum.
Date:
Thu, 2 Mar 2000 18:15:16 +0000
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Chuck,

There is an advert for something like this in the latest issue of
Advanced Packaging, but I gave my copy away yesterday so I can't
tell you who it was.

David Whalley

At 08:19 AM 3/2/00 -0800, you wrote:
>Hi Techies,
>
>About ten years ago I saw a conveyorized plasma clean unit at NEPCON.
>It was small and used an oxygen plasma to clean substrate surfaces.  It
>had an entrance and exit lock to help with the vacuum and a main chamber
>for the plasma reaction.  Does anyone else remember this equipment?  I
>would like to find  one if they still exist. It's OK if your a
>salesperson (PC).
>
>Chuck Brummer
>[log in to unmask]
>
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