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Reply To: | TechNet E-Mail Forum. |
Date: | Thu, 2 Mar 2000 18:15:16 +0000 |
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Chuck,
There is an advert for something like this in the latest issue of
Advanced Packaging, but I gave my copy away yesterday so I can't
tell you who it was.
David Whalley
At 08:19 AM 3/2/00 -0800, you wrote:
>Hi Techies,
>
>About ten years ago I saw a conveyorized plasma clean unit at NEPCON.
>It was small and used an oxygen plasma to clean substrate surfaces. It
>had an entrance and exit lock to help with the vacuum and a main chamber
>for the plasma reaction. Does anyone else remember this equipment? I
>would like to find one if they still exist. It's OK if your a
>salesperson (PC).
>
>Chuck Brummer
>[log in to unmask]
>
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