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March 2000

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Subject:
From:
Chuck Brummer <[log in to unmask]>
Reply To:
TechNet E-Mail Forum.
Date:
Thu, 2 Mar 2000 08:19:04 -0800
Content-Type:
text/plain
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Hi Techies,

About ten years ago I saw a conveyorized plasma clean unit at NEPCON.
It was small and used an oxygen plasma to clean substrate surfaces.  It
had an entrance and exit lock to help with the vacuum and a main chamber
for the plasma reaction.  Does anyone else remember this equipment?  I
would like to find  one if they still exist. It's OK if your a
salesperson (PC).

Chuck Brummer
[log in to unmask]

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