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March 2000

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Date:
Tue, 7 Mar 2000 15:31:01 +0800
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Hi,

   I am currently working with Atotech horizontal Copper pulse plating proccess
      with inert anode.



   Anybody have the experience with this process with leveller I, II , III or H6
      especially regarding

   bath stability?  Any reliability and throwing power data available ?



   What is the forward, average and reverse current density used ?



   What is the frequency of carbon treatment ?



   What is the operating range of brightener and leveller ?



   What is the operating speed and the plating thickness achieved ?



   What process preceeds the pulse plating process (e.g. E'less Cu, DM or
      others) ?



   Thank you and with best regards

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