Nancy

I have experience in this area- especially in the small lab setting.  The
RIE is probably not a good way to go due to it's poor via profile, although
it can be done.  There are laser-based alternatives.  Please contact me
offline.

Carey

-----Original Message-----
From: Nancy M. H. Holloway <[log in to unmask]>
To: [log in to unmask] <[log in to unmask]>
Date: Tuesday, January 11, 2000 10:37 AM
Subject: [TN] Anyone doing microvias?


>TechNet,
>
>   We are investing setting up a small lab to do microvias in flex circuits
>using a reactive ion etcher (RIE plasma etcher).  What Class of clean room
>should I establish to do this work in?  What kind of holding fixtures are
>used in the fabrication process?  What kinds of dielectric material (spin
>on polymers) are you using?
>
>                                        Thanks,
>                                        Nancy
>
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