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January 2000

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Subject:
From:
"Nancy M. H. Holloway" <[log in to unmask]>
Reply To:
TechNet E-Mail Forum.
Date:
Tue, 11 Jan 2000 14:03:59 -0500
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TechNet,

   We are investing setting up a small lab to do microvias in flex circuits
using a reactive ion etcher (RIE plasma etcher).  What Class of clean room
should I establish to do this work in?  What kind of holding fixtures are
used in the fabrication process?  What kinds of dielectric material (spin
on polymers) are you using?

                                        Thanks,
                                        Nancy

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