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Nancy
I have experience in this area- especially in the small lab setting. The
RIE is probably not a good way to go due to it's poor via profile, although
it can be done. There are laser-based alternatives. Please contact me
offline.
Carey
-----Original Message-----
From: Nancy M. H. Holloway <[log in to unmask]>
To: [log in to unmask] <[log in to unmask]>
Date: Tuesday, January 11, 2000 10:37 AM
Subject: [TN] Anyone doing microvias?
>TechNet,
>
> We are investing setting up a small lab to do microvias in flex circuits
>using a reactive ion etcher (RIE plasma etcher). What Class of clean room
>should I establish to do this work in? What kind of holding fixtures are
>used in the fabrication process? What kinds of dielectric material (spin
>on polymers) are you using?
>
> Thanks,
> Nancy
>
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