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September 1999

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Subject:
From:
Hinners Hans CIV WRALC/LYPME <[log in to unmask]>
Reply To:
TechNet E-Mail Forum.
Date:
Mon, 13 Sep 1999 23:51:08 +0100
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Hi Yasmeen,

Luckily I still hang onto my semiconductor processing books from Grad.
school (SC Babe!).

Sheet Resistance of a diffusion layer can be measured with a four point
probe.

Sheet Resistance, R
Average Resistivity, p (rho)
Layer Thickness, x

p = Rx  (Ohm-cm)

From page 419, Semiconductor Integrated Circuit Processing Technology by
Runyan and Bean, 1994

Does that help or do PCB folks calculate it a different way?

Hans

~~~~~~~~
Hans Michel Hinners                                     WR-ALC/LYPME Bldg.
640
Materials Engineer                                      380 Second Street,
Suite 104
Manufacturing Eng. Sec.                         Robins AFB GA 31098-1638
912-926-1970 (Voice) 468 - 1970 (DSN)   912-926-7974 (Fax)
[log in to unmask]



> -----Original Message-----
> From: nishath yasmeen [SMTP:[log in to unmask]]
> Sent: Monday, September 13, 1999 06:05
> To:   [log in to unmask]
> Subject:      [TN] Sheet resistance Vs resistivity
>
> Hello Technetters,
>     What is the difference between S.resistance and Resistivity and how
> can I convert one from the other?
> Thank you in advance.
> Yasmeen

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