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| From: | |
| Date: | Wed, 26 Jun 96 13:22:32 PDT |
| Content-Type: | text/plain |
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"Handbook of Plasma Processing Technology"
Edited by S. Rossnagel, J. Cuomo, and W. Westwood
Noyes Publication
ISBN 0-8155-1220-1
Randy Reed
Merix Corporation
[log in to unmask] Wrote:
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| I am looking for reference material (articles, books,
| papers, etc)
| that specifically discuss plasma etchback processes.
| Any suggestions ?
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| Thanks,
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| D.Drake
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