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May 1998

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Subject:
From:
Ken Bridges <[log in to unmask]>
Reply To:
TechNet E-Mail Forum.
Date:
Tue, 12 May 1998 09:10:21 -0700
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Scott has the right approach.  I also find that proper nozzle maintenance
is essential to make sure streams are not formed from worn or abused
nozzles.

I alway recommend to switch to full cone nozzles in developing and
rinse, whenever possible, to reduce the pressure per surface sq in of
developed area.  Even though cones may produce the same pressure in
the manifold as does fans, there is a difference on the actual resist
surface.
Ken Bridges
Morton Electronic Materials.

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