To Colight, Thanks for the follow up response.

I knew you could respond with a more detailed technical
response than I could.  
Bob Stumpf

>>> Colight <[log in to unmask]> 11/05/96 06:34pm >>>
No, all 5kW machines are not created equally.  5kW is
simply the amount  of power that is required to run the lamp
and does not necessarily relate  directly to the light output.

A few things to consider:
- Different lamp types (i.e.: capillary, straight mercury vapor, 
iron-doped) emit different light spectra and intensities.
- Jacketed (water-cooled) lamps add an extra layer of glass
and a layer  of water for the light to go through, so you can
lose quite a bit of  light there.
- Yes, you should focus on exposure plane intensity (but
make sure that  the intensities were measured using the
same radiometer, because no two  measure exactly alike.) 
I#ve got some field test data comparing the  machines
you#re looking at, if you#d like to get in touch with me.
- As you probably know, you#ll get better resolution and
straighter side  walls if you hit your resist with higher
intensity for a shorter time.   (Not to mention the production
rate increase from a short exposure  cycle.)
- What Scott Kivi mentions about cooling is important, too. 
Look for  high a/c BTUs and a well-controlled air flow over the
exposure plane.

Send me e-mail if you want to discuss anything else.

- Scott Thompson

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