Contact March Instruments, Inc. They have free process notes for most plasma
cleaning methods. You can reach March Instruments, Inc. per the following:
address: 125 Mason Circle "J" Concord, CA 94520-1278
phone: 800-326-1151 or 510-827-1240
fax: 510-827-1189
email: [log in to unmask]
Tom Carroll
Hughes Aircraft Co.
310-334-4757
[log in to unmask]
_______________________________________________________________________________
Subject: FAB: etching process
From: [log in to unmask] at CCGATE
Date: 6/26/96 6:25 AM
I am looking for reference material (articles, books, papers, etc)
that specifically discuss plasma etchback processes. Any suggestions ?
Thanks,
D.Drake
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