Our etcher have the "fine line" feature build in. But I just have some
doubt about this "feature". It works by enabling the adjustment of
pressure profile along the perpendicular axis of a panel. Typically,
the middle pressure is adjusted to a higher value than the side.
Ideally, this should reduce the puddling effect at the center part of
a panel. But, please look at the diagram below:
_______________________________________
| |
| a b c |
| |
| |
| |
| |
| d e f |
| |
| |
| |
| |
| g h i |
---------------------------------------
------------------>
conveyor direction
Now, the puddling usually occur at "e". By increasing the middle
pressure of the etcher, "d","e","f" is then subjected to high pressure
spray, while "a","b","c","g","h","i" are at low pressure spray. So the
fine line feature eliminates puddling effect at "e". Good, but how
about "d" and "f". This 2 positions do not have puddling under normal
condition, but are subjected to high pressure spray.
And in reality, I discover that position "a" and "f" really are the
places where overetch usually occur.
If anybody is also using an etcher with the fine line feature, please
tell me if you also have this problem. If so, how do you solve it?
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