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Date: | Tue, 17 Sep 96 08:07:56 PST |
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>We like to use the above gas for plasma etching and like to know if this gas
>is safe to use and if any safety precausions are required.
I have a feeling that you might encounter a problem with corrosion using
ammonia in an aluminum vacuum vessel. Are you currently using ammonia in
your process at the moment?
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