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Date:
Sun, 06 Oct 96 16:22:37 PST
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     Several manufactures of radiometers make models that measure the 
     wavelengths.  EIT and I.L. are two of them.


______________________________ Reply Separator _________________________________
Subject: Fab- monitoring wavelength in exposure units
Author:  [log in to unmask] at corp
Date:    10/5/96 3:19 PM


With UV exposure units the intensity of the lamps is measured 
with a radiometer. In our imaging departments, we keep a close eye on 
our exposures as far as intensity. However we've been overlooking an 
equally important factor, UV wavelength, and the radiometer doesn't 
measure that.  I am looking for a practical method of measuring and 
monitoring the wavelength of the lamp as it degrades. If anyone can 
steer me in the right direction or has any input on this matter, I 
would appreciate talking with you.
     
Scott Kivi
Primary imaging / Mask applications
     
E-mail - [log in to unmask]
     
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