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Date: | Fri, 02 Aug 1996 09:01:45 +0900 |
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Has anyone had any experience in controlling ultrathins (0.004 in 0.5/0.5)
dimensional stabibity?
What are the factors that effect the ultrathins misregistration and how to
reduce the misregistration to the minmum.
Appreciate if anyone can provide an answer.
Thanks in advance
Chen Xiao bo
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